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Research Spending & Results

Award Detail

Awardee:NORTHEASTERN UNIVERSITY
Doing Business As Name:Northeastern University
PD/PI:
  • Ahmed A Busnaina
  • (617) 373-2992
  • busnaina@coe.neu.edu
Co-PD(s)/co-PI(s):
  • Nicol E McGruer
  • Glen P Miller
  • Carol Barry
  • Joey L Mead
Award Date:08/24/2009
Estimated Total Award Amount: $ 2,450,000
Funds Obligated to Date: $ 12,949,641
  • FY 2011=$2,725,000
  • FY 2014=$45,000
  • FY 2010=$2,799,958
  • FY 2009=$2,450,000
  • FY 2012=$2,450,000
  • FY 2013=$2,479,683
Start Date:09/01/2009
End Date:05/31/2015
Transaction Type: Cooperative Agreements
Agency:NSF
Awarding Agency Code:4900
Funding Agency Code:4900
CFDA Number:47.041
Primary Program Source:040100 NSF RESEARCH & RELATED ACTIVIT
Award Title or Description:NSEC: Center for High-rate Nanomanufacturing
Federal Award ID Number:0832785
DUNS ID:001423631
Parent DUNS ID:001423631
Program:NANOSCALE: SCIENCE & ENGIN CTR
Program Officer:
  • Carole Read
  • (703) 292-2418
  • cread@nsf.gov

Awardee Location

Street:360 HUNTINGTON AVE
City:BOSTON
State:MA
ZIP:02115-5005
County:Boston
Country:US
Awardee Cong. District:07

Primary Place of Performance

Organization Name:Northeastern University
Street:360 HUNTINGTON AVE
City:BOSTON
State:MA
ZIP:02115-5005
County:Boston
Country:US
Cong. District:07

Abstract at Time of Award

3. Project Summary Transferring breakthroughs in nanoscale science into new technologies requires that we understand and overcome barriers to nanoscale manufacturing. In addressing the NNI Grand Challenges and the many hurdles identified at NSF Workshops on Nanomanufacturing, CHN has identified the following critical questions, which define the fundamental technical barriers to nanomanufacturing: 1. How can we assemble different nano-scale elements? What are the mechanisms leading to the assembly and orientation of nanoscale structures? How do we control these mechanisms? 2. How can we scale up assembly processes in a continuous or high rate manner? How do we control the interfacial behavior and forces required to assemble, detach, and transfer nanoelements at high rates? 3. How can we test for reliability in nanostructures? How can we detect and mitigate defects? 4. How can nanomanufacturing processes meet existing and future environmental and health regulations? The CHN is developing the processes and tools to overcome these fundamental barriers, with a synergistic team of three universities: Northeastern University, Boston; University of Massachusetts Lowell; and University of New Hampshire, Durham. These equal partners form the Center for High-rate Nanomanufacturing (CHN). This ongoing collaborative effort has demonstrated that this effective and unique partnership, combining the skills of 39 engineers, physicists, chemists, material scientists, business and humanities investigators with diverse expertise has the capacity to tackle these critical barriers. Goals The Center for High-rate Nanomanufacturing goals are: 1. Understand the fundamentals of synthesis and control at the nanoscale to enable high-rate/highvolume bottom-up, precise directed assembly of nanoelements 2. Translate nanoscale science to practical applications in energy, biomedical, electronics and materials. 3. Develop responsible manufacturing by identifying and managing potential risks of nanotechnology 4. Educate the current and emerging nanomanufacturing workforce. Programs The CHN?s approach to nanomanufacturing processes is fully integrated. The CHN has made major strides to advance our vision for High-rate/high-volume nanomanufacturing. This vision includes synthesis and/or functionalization of nanoelements ; uses templates for directed assembly ; transfers assembled structures ; integrates assembled structures into test beds and emerging applications. Combined with responsible manufacturing, and cross-cutting research including modeling, reliability, and defect mitigation, the above barriers define the CHN research thrusts: Thrust 1: Synthesize nanoelements and create versatile nanotemplates Thrust 2: Employ nanotemplates to enable high-rate/high-volume manufacturing Thrust 3: Proof of Concept Test Beds, Emerging Applications, and Manufacturing Readiness Thrust 4: Concurrently assess the environmental, economic, regulatory, and ethical impacts of nanomanufacturing The CHN is defining and developing high-rate nanomanufacturing processes that will enable: Consistent nanoscale directed assembly over large areas (measured in inches or feet), fast nanoscale directed assembly (measured in minutes or seconds), assembly of a large volume of nanoelements, repeatable and high yield assembly processes, and assembly of reliable structures. The CHN process flow chart shown here illustrates how the different research thrusts and tasks are connected starting with nanoelements and nanotemplates (Thrust 1), continuing to their assembly and transfer (Thrust 2) and then on to the realization of test beds and applications (Thrust 3), all while evaluating environmental and economic impacts (Thrust 4). The flow chart illustrates the highly integrated nature of CHN and also shows how a system-level focus drives the research from discovery through proof-of-concept test beds. It also shows how-multi scale modeling is used to understand and guide fundamental mechanisms in synthesis, assembly and transfer.

Publications Produced as a Result of this Research

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Park, J.G.;Lee, S.H.;Ryu, J.S.;Hong, Y.K.;Kim, T.G.;Busnaina, A.A.; "Interfacial and electrokinetic characterization of IPA solutions related to semiconductor wafer drying and cleaning" Journal of The Electrochemical Society, v.153, 2006, p.G811.

Bakhtari, K.;Guldiken, R.O.;Makaram, P.;Busnaina, A.A.;Park, J.G.; "Experimental and numerical investigation of nanoparticle removal using acoustic streaming and the effect of time" Journal of The Electrochemical Society, v.153, 2006, p.G846.

Kim, I.K.;Prasad, Y.N.;Kwon, T.Y.;Kim, H.M.;Busnaina, A.A.;Park, J.G.; "O4 Based Alkaline Cleaning Solution for Particle Removal during Post-Ru CMP Cleaning" Journal of The Electrochemical Society, v.158, 2011, p.H1052.

Choi, J.G.;Prasad, Y.N.;Kim, I.K.;Kim, I.G.;Kim, W.J.;Busnaina, A.A.;Park, J.G.; "Analysis of scratches formed on oxide surface during chemical mechanical planarization" Journal of The Electrochemical Society, v.157, 2010, p.H186.

Choi,J., Prasad,Y., Kim,I., Kim, I., Kim,W., Busnaina, A. and Park,J. "Analysis of Scratches Formed on Oxide Surface during Chemical Mechanical Planarization" Journal of The Electrochemical Society, v.157 (2), 2010, p.H186.

Kim, I, Cho, B, Park, J, Park, J and Park,H "Effect of pH in Ru Slurry with Sodium Periodate on Ru CMP" Journal of The Electrochemical Society, v.156 (3), 2009, p.H188.

Kim, I.K.;Cho, B.G.;Park, J.G.;Park, J.Y.;Park, H.S.; "Effect of pH in Ru Slurry with Sodium Periodate on Ru CMP" Journal of The Electrochemical Society, v.156, 2009, p.H188.

Hong, Y.K.;Han, J.H.;Kim, T.G.;Park, J.G.;Busnaina, A.A.; "The effect of frictional and adhesion forces attributed to slurry particles on the surface quality of polished copper" Journal of The Electrochemical Society, v.154, 2007, p.H36.

Hu, S.;Kim, T.H.;Park, J.G.;Busnaina, A.A.; "Effect of different deposition mediums on the adhesion and removal of particles" Journal of The Electrochemical Society, v.157, 2010, p.H662.

Choi, J.G.;Prasad, Y.N.;, I.K.;Kim, W.J.;Park, J.G.; "The Synergetic Role of Pores and Grooves of the Pad on the Scratch Formation during STI CMP" Journal of The Electrochemical Society, v.157, 2010, p.H806.

Park, J, Prasad,Y.N., Kang, Y., Kim, I. "Effect of Polysilicon Wettability on Polishing and Organic Defects during CMP" Journal of The Electrochemical Society, v.156, 11, 2009, p.H869.

Park, J.G.;Prasad, Y.N.;Kang, Y.J.;Kim, I.K.;Hong, Y.K.;Han, S.Y.;Yun, S.K.;Yoon, B.U.;Busnaina, A.A.; "Effect of Polysilicon Wettability on Polishing and Organic Defects during CMP" Journal of The Electrochemical Society, v.156, 2009, p.H869.

Kim, I.K.;Kwon, T.Y.;Kim, D.C.;Park, M.S.;Park, J.G.; "Hydrophobic Modification of Diamond Conditioner for Prevention of Particle Adhesion During Oxide CMP" Journal of The Electrochemical Society, v.158, 2011, p.H941.

Briggs, J. B.; Jazdzyk, M. D.; Miller, G. P. "1,2- Dimethyl- 4,5-diphenylbenzene determined on a Bruker SMART X2S benchtop crystallographic system" Acta Cryst., v.E65, 2009, p.o1171.

Briggs, J.B.;Jazdzyk, M.D.;Miller, G.P.; "1, 2-Dimethyl-4, 5-diphenylbenzene determined on a Bruker SMART X2S benchtop crystallographic system" Acta Crystallographica Section E: Structure Reports Online, v.65, 2009, p.o1171-o11.

Briggs, J. B.; Jazdzyk, M. D.; Miller, G. P. "2,3- Bis(bromomethyl)-1,4- diphenylbenzene" Acta Cryst., v.E66, 2010, p.o12.

Briggs, J.B.;Jazdzyk, M.D.;Miller, G.P.; "2, 3-Bis (bromomethyl)-1, 4-diphenylbenzene" Acta Crystallographica Section E: Structure Reports Online, v.66, 2009, p.o12-o12.

Briggs, J. B.; Jia, W.; Jazdzyk, M. D.; Miller, G. P. "2,5- Dichlorothiophene 1,1- dioxide" Acta Cryst., v.E65, 2009, p.o3258.

Briggs, J.B.;Jia, W.;Jazdzyk, M.D.;Miller, G.P.; "2, 5-Dichlorothiophene 1, 1-dioxide" Acta Crystallographica Section E: Structure Reports Online, v.65, 2009, p.o3258-o32.

Tománek, D.; "Carbon-based nanotechnology on a supercomputer" Journal of Physics: Condensed Matter, v.17, 2005, p.R413.

Tománek, D.; "Carbon-based nanotechnology on a supercomputer" Journal of Physics: Condensed Matter, v.17, 2005, p.R413.

Singh, J.;Whitten, J.E.; "Forces between Polymer Surfaces and Self-Assembled Monolayers" Journal of Macromolecular Science, Part A, v.45, 2008, p.884-891.

Wang, X.;Xu, J.;Zhu, Y.;Cooper, K.L.;Wang, A.; "All-fused-silica miniature optical fiber tip pressure sensor" Optics letters, v.31, 2006, p.885-887.

Briggs, J.B.;Miller, G.P.; "Fullereneâ??acene chemistry: a review" Comptes Rendus Chimie, v.9, 2006, p.916-927.

Aceros, J.C.;McGruer, N.E.;Adams, G.G.; "Microelectromechanical system microhotplates for reliability testing of thin films and nanowires" Technology B: Microelectronics and Nanometer Structures, v.26, 2008, p.918.

Eid, H.;Adams, GG;McGruer, NE;Fortini, A.;Buldyrev, S.;Srolovitz, D.; "A Combined Molecular Dynamics and Finite Element Analysis of Contact and Adhesion of a Rough Sphere and a Flat Surface" Tribology Transactions, v.54, 2011, p.920-928.

Xiong, X.;Busnaina, A.; "Direct assembly of nanoparticles for large-scale fabrication of nanodevices and structures" Journal of Nanoparticle Research, v.10, 2008, p.947-954.

Miller, G.P.; "fullerene: a review" Comptes Rendus Chimie, v.9, 2006, p.952-959.

Bello, D.;Hart, A.J.;Ahn, K.;Hallock, M.;Yamamoto, N.;Garcia, E.J.;Ellenbecker, M.J.;Wardle, B.L.; "Particle exposure levels during CVD growth and subsequent handling of vertically-aligned carbon nanotube films" Carbon, v.46, 2008, p.974-977.

Berber, S.;Tománek, D.; "Modeling the destruction of realistic nanotube emitters: Relative role of charging and temperature" Physical Review-Section B-Condensed Matter, v.77, 2008, p.73407-734.

Ahn, K.;Woskie, S.;DiBerardinis, L.;Ellenbecker, M.; "A review of published quantitative experimental studies on factors affecting laboratory fume hood performance" Journal of Occupational and Environmental Hygiene, v.5, 2008, p.735-753.

Eid, H.;Adams, G.G.; "An elasticâ??plastic finite element analysis of interacting asperities in contact with a rigid flat" Journal of Physics D: Applied Physics, v.40, 2007, p.7432.

Barry, C.;Chen, J.;Mead, J.;Schmidt, D.; "Multiscale Processing of Polymers and Nanocomposites" Materials Processing Handbook, v., 2007, p.759-790.

Müftü, S.; "Mechanics of a thin, tensioned shell, wrapped helically around a turn-bar" Journal of fluids and structures, v.23, 2007, p.767-785.

Nemec, N.;Tománek, D.;Cuniberti, G.; "Contact dependence of carrier injection in carbon nanotubes: An ab initio study" Physical review letters, v.96, 2006, p.76802.

Marx, K.A.;Zhou, T.;Montrone, A.;McIntosh, D.;Braunhut, S.J.; "A comparative study of the cytoskeleton binding drugs nocodazole and taxol with a mammalian cell quartz crystal microbalance biosensor: Different dynamic responses and energy dissipation effects" Analytical biochemistry, v.361, 2007, p.77-92.

Raman, R.K.;Murooka, Y.;Ruan, C.Y.;Yang, T.;Berber, S.;Tománek, D.; "Direct observation of optically induced transient structures in graphite using ultrafast electron crystallography" Physical review letters, v.101, 2008, p.77401.

Tsai, S.J.C.;Huang, R.F.;Ellenbecker, M.J.; "osures while using constant-flow, constant-velocity, and air-curtain-isolated fume hoods" Annals of occupational hygiene, v.54, 2010, p.78-87.

Cleary, S.M.;Mayne, H.R.; "High-symmetry global minimum geometries for small mixed Ar/Xe Lennard-Jones clusters" Chemical physics letters, v.418, 2006, p.79-83.

Wei, M., Fang, L., Lee, J., Somu, S., Xiong, X., Barry, C., Busnaina, A. and Mead, J. "Directed Assembly of Polymer Blends Using Nano-patterned Templates" Adv. Mater, v.21, 2009, p.794.

Wei, M.;Fang, L.;Lee, J.;Somu, S.;Xiong, X.;Barry, C.;Busnaina, A.;Mead, J.; "Directed assembly of polymer blends using nanopatterned templates" Advanced Materials, v.21, 2009, p.794-798.

Jaber-Ansari, L., Hahm, M., Somu, S., Echegoyen, Y., Busnaina, A., Jung, Y. "Mechanism of Very Large Scale Assembly of SWNTs in Template Guided Fluidic Assembly Process" Journal of the American Chemical Society, v.131, 2009, p.804.

Jaber-Ansari, L., Hahm, M., Somu, S., Busnaina, A. and Jung, Y. "Study of the Assembly Mechanism of Aligned Bundles of Single-Walled Carbon Nanotubes" JACS, v.131, 2009, p.804.

Jaber-Ansari, L.;Hahm, M.G.;Somu, S.;Sanz, Y.E.;Busnaina, A.;Jung, Y.J.; "Mechanism of very large scale assembly of SWNTs in template guided fluidic assembly process" Journal of the American Chemical Society, v.131, 2008, p.804-808.

Chandekar, Amol;Sengupta, Sandip K.;Barry, Carol M. F.;Mead, Joey L.;Whitten, James E.; "Template-Directed Adsorption of Block Copolymers on Alkanethiol-Patterned Gold Surfaces" Langmuir, v.22, 2006, p.8071-8077.

Friedman, A.L.;Chun, H.;Heiman, D.;Joon Jung, Y.;Menon, L.; "Investigation of electrical transport in hydrogenated multiwalled carbon nanotubes" Physica B: Condensed Matter, v.406, 2011, p.841-845.

Popov, I.;Yang, T.;Berber, S.;Seifert, G.;Tománek, D.; "Unique structural and transport properties of molybdenum chalcohalide nanowires" Physical review letters, v.99, 2007, p.85503.

Huo, H.;Shen, M.;Ebstein, S.M.;Guthermann, H.; "ee substrates" Journal of Mass Spectrometry, v.46, 2011, p.859-864.

Cherchi, C.;Chernenko, T.;Diem, M.;Gu, A.Z.; "Impact of nano titanium dioxide exposure on cellular structure of Anabaena variabilis and evidence of internalization" Environmental Toxicology and Chemistry, v.30, 2011, p.861-869.

David Tománek; "Calling to Be Your Best: Your Calling to Science" Mater. Express, v.1, 2011, p.8687.

Fujimori, T.;Urita, K.;Toma´ nek, D.;Ohba, T.;Moriguchi, I.;Endo, M.;Kaneko, K.; "Selective probe of the morphology and local vibrations at carbon nanoasperities" Journal of Chemical Physics, v.136, 2012, p.64505.

Yilmaz, C.;Kim, T.H.;Somu, S.;Busnaina, A.A.; "Large-Scale Nanorods Nanomanufacturing by Electric-Field-Directed Assembly for Nanoscale Device Applications" Nanotechnology, IEEE Transactions on, v.9, 2010, p.653-658.

Lee, M.;Im, J.;Lee, BY;Myung, S.;Kang, J.;Huang, L.;Kwon, Y.K.;Hong, S.; "Linker-free directed assembly of high-performance integrated devices based on nanotubes and nanowires" Nature Nanotechnology, v.1, 2006, p.66-71.

Yin, Y.;Xiaoqi Zhang;Graham, J.;Luongo, L.; "Examination of purified single-walled carbon nanotubes on activated sludge process using batch reactors" Journal of Environmental Science and Health Part A, v.44, 2009, p.661-665.

Farris, L.R.;Wu, N.;Wang, W.;Clarizia, L.J.A.;Wang, X.;McDonald, M.J.; "Immuno-interferometric sensor for the detection of influenza A nucleoprotein" Analytical and bioanalytical chemistry, v.396, 2010, p.667-674.

Sandler, R.;Kay, W.D.; "The national nanotechnology initiative and the social good" Ethics, v.34, 2006, p.675-681.

Mackness, BC, Chourb, S, Farris,LR, McDonald, MJ. "Polymer-protein Enhanced Fluoroimmunoassay for Prostate-specific Antigen" Anal Bioanal Chem., v.396, 2010, p.681.

Mackness, B.C.;Chourb, S.;Farris, L.R.;McDonald, M.J.; "Polymerâ??protein-enhanced fluoroimmunoassay for prostate-specific antigen" Analytical and bioanalytical chemistry, v.396, 2010, p.681-686.

Kumar, A.;Wei, M.;Barry, C.;Chen, J.;Mead, J.; "Controlling fiber repulsion in multijet electrospinning for higher throughput" d Engineering, v.295, 2010, p.701-708.

Meng, G.;Jung, Y.J.;Cao, A.;Vajtai, R.;Ajayan, P.M.; "Controlled fabrication of hierarchically branched nanopores, nanotubes, and nanowires" Proceedings of the National Academy of Sciences of the United States of America, v.102, 2005, p.7074.

McKernan, J.L.;Ellenbecker, M.J.;Holcroft, C.A.;Petersen, M.R.; "Evaluation of a proposed area equation for improved exothermic process control" Annals of occupational hygiene, v.51, 2007, p.725-738.

Meng, G.;Han, F.;Zhao, X.;Chen, B.;Yang, D.;Liu, J.;Xu, Q.;Kong, M.;Zhu, X.;Jung, Y.J.; "A general synthetic approach to interconnected nanowire/nanotube and nanotube/nanowire/nanotube heterojunctions with branched topology" Angewandte Chemie, v.121, 2009, p.7302-7306.

Diaconescu, B.;Nenchev, G.;Jones, J.;Pohl, K.; "Selfâ??organized nanotemplating on misfit dislocation networks investigated by scanning tunneling microscopy" Microscopy research and technique, v.70, 2007, p.547-553.

Lee, S.H.;Hong, Y.K.;Song, J.H.;Park, J.G.;Busnaina, A.A.;Zhang, G.;Eschbach, F.;Ramamoorthy, A.; "Particle adhesion and removal on EUV mask layers during wet cleaning" Japanese journal of applied physics, v.44, 2005, p.5479.

Wostyn,K., Kim, T., Mertens, P., and Park, J "Analyzing the collapse force of narrow lines measured by lateral force AFM using an analytical mechanical model" Solid State Phenomena, v.145-146, 2009, p.55.

Wostyn, K.;Kim, T.G.;Mertens, P.W.;Park, J.G.; "Analyzing the collapse force of narrow lines measured by lateral force AFM using an analytical mechanical model" Solid State Phenomena, v.145, 2009, p.55-58.

Isaacs, J. A., Tanwani,A., Healy, M., Dahlben, L. J. "Economic Assessment of Single-Walled Carbon Nanotube Processes" Journal of Nanoparticle Research, v.12, Iss, 2010, p.551. doi:10.1007/s11051-009-9673-3 

Isaacs, JA;Tanwani, A.;Healy, ML;Dahlben, LJ; "Economic assessment of single-walled carbon nanotube processes" Journal of Nanoparticle Research, v.12, 2010, p.551-562.

Zen, G.;Müftü, S.; "rating string subjected to frictional guiding forces" Journal of sound and vibration, v.289, 2006, p.551-576.

Briggs, J.B.;Montgomery, M.;Silva, L.L.;Miller, G.P.; "able, Regioselective Synthesis of C 3 v C60H18 Using Organic Polyamines" Organic Letters, v.7, 2005, p.5553-5555.

Diaconescu, B.;Yang, T.;Berber, S.;Jazdzyk, M.;Miller, G.P.;Tománek, D.;Pohl, K.; "Molecular Self-Assembly of Functionalized Fullerenes on a Metal Surface" Physical review letters, v.102, 2009, p.56102.

Sandler, R.;Kay, W.D.; "The GMO-nanotech (dis) analogy?" Society, v.26, 2006, p.57-62.

Jia, W.;Miller, G.P.; "Fullerene" Fullerenes, Nanotubes, and Carbon Nonstructures, v.16, 2008, p.58-65.

Fang L., Wei, M., Shang Y., Jimenez L., Kazmer D., Barry, C., and Mead, J. "Surface Morphology Alignment of Block Copolymers Induced by Injection Molding" Polymer, v.50, Iss, 2009, p.5837.

Fang, L.;Wei, M.;Shang, Y.;Jimenez, L.;Kazmer, D.;Barry, C.;Mead, J.; "Surface morphology alignment of block copolymers induced by injection molding" Polymer, v.50, 2009, p.5837-5845.

Gou, N.;Onnis-Hayden, A.;Gu, A.Z.; "Mechanistic toxicity assessment of nanomaterials by whole-cell-array stress genes expression analysis" technology, v.44, 2010, p.5964-5970.

Alpert, C.L.; "Joining forces for public engagement" Materials Today, v.11, 2008, p.6.

Tsai SJ, Hofmann M, Hallock M, Ada E, Kong J, Ellenbecker, MJ. "Characterization and evaluation of nanoparticle release during the synthesis of single-walled and multi- walled carbon nanotubes by chemical vapor deposition" Env Sci Technol, v.43(15), 2009, p.6017.

Tsai, S.J.;Hofmann, M.;Hallock, M.;Ada, E.;Kong, J.;Ellenbecker, M.; "Characterization and evaluation of nanoparticle release during the synthesis of single-walled and multiwalled carbon nanotubes by chemical vapor deposition" technology, v.43, 2009, p.6017-6023.

Yin, Y.;Zhang, X.; "Evaluation of the impact of single-walled carbon nanotubes in an activated sludge wastewater reactor" Water science and technology: a journal of the International Association on Water Pollution Research, v.58, 2008, p.623.

Song, H.J.;Lee, Y.;Jiang, T.;Kussow, A.G.;Lee, M.;Hong, S.;Kwon, Y.K.;Choi, H.C.; "Self-clusterized glycines on single-walled carbon nanotubes for alcohol sensing" The Journal of Physical Chemistry C, v.112, 2008, p.629-634.

Bubnis, G. J.; Mayne, H. R. "Structures of binary C60/C84 fullerene clusters" J. Phys Chem., v.A 113, 2009, p.4598.

Bubnis, GJ;Mayne, HR; "Structures of Binary C60â?? C84 Fullerene Clustersâ? " The Journal of Physical Chemistry A, v.113, 2009, p.4598-4603.

Wu, Z.;Hahm, M.G.;Jung, Y.J.;Menon, L.; "Epitaxially grown GaN nanowire networks" J. Mater. Chem., v.19, 2009, p.463-467.

Kintigh, J.;Briggs, J.B.;Letourneau, K.;Miller, G.P.; "fullerene and giant fullerenes" J. Mater. Chem., v.17, 2007, p.4647-4651.

Kim, T, Wostyn, K., Park, J, Mertens, P "Pattern Collapse and Particle Removal Forces of Interest to Semiconductor Fabrication Process" Solid State Phenomena, v.145-146, 2009, p.47.

Kim, T.G.;Wostyn, K.;Park, J.G.;Mertens, P.W.;Busnaina, A.A.; "Pattern Collapse and Particle Removal Forces of Interest to Semiconductor Fabrication Process" Solid State Phenomena, v.145, 2009, p.47-50.

Pfefferkorn, F.E.;Bello, D.;Haddad, G.;Park, J.Y.;Powell, M.;Mccarthy, J.;Bunker, K.L.;Fehrenbacher, A.;Jeon, Y.;Virji, M.A.; "nanoscale particles during friction stir welding of aluminum" Annals of occupational hygiene, v.54, 2010, p.486-503.

Kim, T.G.;Yoo, Y.S.;Ahn, J.;Lee, J.M.;Choi, J.S.;Busnaina, A.A.;Park, J.G.; "Damage Free Particle Removal from Extreme Ultraviolet Lithography Mask Layers by High Energy Laser Shock Wave Cleaning" Japanese journal of applied physics, v.47, 2008, p.4886.

Wongkasem, N.;Akyurtlu, A.;Marx, K.A.;Goodhue, W.D.;Li, J.;Dong, Q.;Ada, E.T.; "Fabrication of a novel micron scale Yâ??structureâ??based chiral metamaterial: Simulation and experimental analysis of its chiral and negative index properties in the terahertz and microwave regimes" Microscopy research and technique, v.70, 2007, p.497-505.

Kang, S.H.;Kwon, Y.K.;Tománek, D.; "Interplay between structural and electronic properties of bundled Mo6S9â?? xIx nanowires" Journal of Physics: Condensed Matter, v.22, 2010, p.505301.

Chandekar, A.;Sengupta, S.K.;Whitten, J.E.; "Templateâ??directed patterning of polymers and biomaterials" Microscopy research and technique, v.70, 2007, p.506-512.

Dettlaff-Weglikowska, U.;Skákalová, V.;Graupner, R.;Jhang, S.H.;Kim, B.H.;Lee, H.J.;Ley, L.;Park, Y.W.;Berber, S.;Tománek, D.; "Effect of SOCl2 treatment on electrical and mechanical properties of single-wall carbon nanotube networks" Journal of the American Chemical Society, v.127, 2005, p.5125-5131.

Rauwerdink, K.;Liu, J.F.;Kintigh, J.;Miller, G.P.; "fullerene nanotubes" Microscopy research and technique, v.70, 2007, p.513-521.

Du, Y.;Chen, L.;McGruer, N.E.;Adams, G.G.;Etsion, I.; "A finite element model of loading and unloading of an asperity contact with adhesion and plasticity" Journal of colloid and interface science, v.312, 2007, p.522-528.

Bello, D.;Isaacs, J.A.; "Safety Assessment of Nanotechnology Products" Comprehensive Toxicology, v.Vol 3 T, 2010, p.53-64.

Wright, D.;Rajalingam, B.;Karp, J.M.;Selvarasah, S.;Ling, Y.;Yeh, J.;Langer, R.;Dokmeci, M.R.;Khademhosseini, A.; "Reusable, reversibly sealable parylene membranes for cell and protein patterning" Journal of Biomedical Materials Research Part A, v.85, 2008, p.530-538.

Guldiken, R.;Makaram, P.;Bakhtari, K.;Park, J.;Busnaina, A.A.; "Nanoparticle scanning and detection on flat and structured surfaces using fluorescence microscopy" Microscopy research and technique, v.70, 2007, p.534-538.

Park, J.G.;Busnaina, A.; "Cu Post-CMP cleaning and the effect of additives" Semiconductor international, v.28, 2005, p.39-44.

Prasad, YN;Kwon, TY;Kim, IK;Kim, IG;Park, JG; "Generation of Pad Debris during Oxide CMP Process and Its Role in Scratch Formation" Journal of The Electrochemical Society, v.158, 2011, p.394.

Makaram, P.;Selvarasah, S.;Xiong, X.;Chen, C.L.;Busnaina, A.;Khanduja, N.;Dokmeci, M.R.; "Three-dimensional assembly of single-walled carbon nanotube interconnects using dielectrophoresis" Nanotechnology, v.18, 2007, p.395204.

Kang, Y.J.;Prasad, Y.N.;Kim, I.K.;Jung, S.J.;Park, J.G.; "s of Fe metal precipitated colloidal silica and its application to W chemical mechanical polishing (CMP) slurry" Journal of colloid and interface science, v.349, 2010, p.402-407.

Yoon, S. , Cha, N., Lee, J., Park, J., Carter, D., Mead, J., and Barry, C. "Effect of Processing Parameters, Antistiction Coatings, and Polymer Type when Injection Molding Microfeatures" Polymer Engineering and Science, v.50 (2), 2010, p.411.

Yoon, S.H.;Cha, N.G.;Lee, J.S.;Park, J.G.;Carter, D.J.;Mead, J.L.;Barry, C.M.F.; "Effect of processing parameters, antistiction coatings, and polymer type when injection molding microfeatures" Science, v.50, 2010, p.411-419.

Müftü, S.;Müftü, A.; "Biomechanics of Tooth and Jaw" Encyclopedia of medical devices and instrumentation, v., 2006, p.411-428.

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Liberman, V.;Yilmaz, C.;Bloomstein, TM;Somu, S.;Echegoyen, Y.;Busnaina, A.;Cann, SG;Krohn, KE;Marchant, MF;Rothschild, M.; "A Nanoparticle Convective Directed Assembly Process for the Fabrication of Periodic Surface Enhanced Raman Spectroscopy Substrates" Advanced Materials, v.22, 2010, p.4298-4302.

Bello, D.;Wardle, B.;Zhang, J.;Yamamoto, N.;Santeufemio, C.;Hallock, M.;Virji, M.A.; "Characterization of exposures to nanoscale particles and fibers during solid core drilling of hybrid carbon nanotube advanced composites" International journal of occupational and environmental health, v.16, 2010, p.434-450.

Morrison, D.W.G.;Dokmeci, M.R.;Demirci, U.;Khademhosseini, A.; "Clinical Applications of Microâ??and Nanoscale Biosensors" Biomedical nanostructures, v., 2008, p.439-460.

Park, J.G.; "Fabrication and Characterization of the 32 x 32 Array Digital Si-PIN X-ray Detector for Single Photon Counting Image Sensor" Journal of Korean Physical Society, v.57, 2010, p.44.

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Huang, J.;Datar, A.;Somu, S.;Busnaina, A.; "Modulating the performance of carbon nanotube field-effect transistors via Rose Bengal molecular doping" Nanotechnology, v.22, 2011, p.455202.

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Wang, W.M.;LeMieux, M.C.;Selvarasah, S.;Dokmeci, M.R.;Bao, Z.; "Dip-pen nanolithography of electrical contacts to single-walled carbon nanotubes" ACS nano, v.3, 2009, p.3543-3551.

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Han, J.H.;Koo, J.E.;Hong, D.H.;Park, B.L.;Kim, S.I.;Cho, I.S.;Eom, D.H.;Park, J.G.;Busnaina, A.A.; "Effects of patterns on corrosion in Cu CMP" Solid State Phenomena, v.103, 2005, p.369-372.

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Jaber-Ansari, L., Hahm,M., Kim,T., Somu,S., Busnaina, A. and Jung, Y. "Highly Organized Single-Walled Carbon Nanotube Networks for Electrical Devices" Appl. Phys, v.A96, 2009, p.373.

Jaber-Ansari, L.;Hahm, M.G.;Kim, T.H.;Somu, S.;Busnaina, A.;Jung, Y.J.; "Large scale highly organized single-walled carbon nanotube networks for electrical devices" Processing, v.96, 2009, p.373-377.

Healy, M.L.;Dahlben, L.J.;Isaacs, J.A.; "Environmental Assessment of Singleâ??Walled Carbon Nanotube Processes" Journal of Industrial Ecology, v.12, 2008, p.376-393.

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Gaith, M.;Müftü, S.; "Lateral vibration of two axially translating beams interconnected by a Winkler foundation" Journal of vibration and acoustics, v.129, 2007, p.380.

Tsai, S.J.;Ashter, A.;Ada, E.;Mead, J.L.;Barry, C.F.;Ellenbecker, M.J.; "Control of airborne nanoparticles release during compounding of polymer nanocomposites" Nano, v.3, 2008, p.301.

Rainbolt, J.E.;Miller, G.P.; "4, 7-diphenylisobenzofuran: A useful intermediate for the construction of phenyl-substituted acenes" The Journal of Organic Chemistry, v.72, 2007, p.3020-3030.

Chao, D.;Jia, X.;Bai, F.;Liu, H.;Cui, L.;Berda, E.B.;Wang, C.; "An efficient fluorescent sensor for redox active species based on novel poly (aryl ether) containing electroactive pendant" J. Mater. Chem., v.22, 2012, p.3028-3034.

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Selvarasah, S.;Chao, SH;Chen, C.L.;Sridhar, S.;Busnaina, A.;Khademhosseini, A.;Dokmeci, MR; "A reusable high aspect ratio parylene-C shadow mask technology for diverse micropatterning applications" Sensors and Actuators A: Physical, v.145, 2008, p.306-315.

Mackness, B.C.;McDonald, M.J.; "Serum-based ALYGNSA immunoassay for the prostate cancer biomarker, total prostate-specific antigen (tPSA)" Analytical and bioanalytical chemistry, v.397, 2010, p.3151-3154.

Chourb S, Mackness BC, Farris LR, McDonald MJ. "Enhanced Immuno-Detection of Shed Extracellular Domain of HER- 2/neu" HEALTH, v.1, 2009, p.325.

Chourb, S.;Mackness, B.C.;Farris, L.R.;McDonald, M.J.; "Enhanced immuno-detection of shed extracellular domain of HER-2/neu" Health, v.1, 2009, p.325-329.

Kang, D.;Kim, D.;Yoon, S.H.;Barry, C.;Mead, J.; "Properties and Dispersion of EPDM/Modifiedâ??Organoclay Nanocomposites" Macromolecular Materials and Engineering, v.292, 2007, p.329-338.

Eom, D.H.;Lim, G.B.;Park, J.G.;Busnaina, A.A.; "con wafers" Japanese journal of applied physics, v.43, 2004, p.3335.

Park, S.;Kittimanapun, K.;Ahn, J.S.;Kwon, Y.K.;Tománek, D.; "Designing rigid carbon foams" Journal of Physics: Condensed Matter, v.22, 2010, p.334220.

Nieva, PM;McGruer, NE;Adams, GG; "Design and characterization of a micromachined Fabryâ??Perot vibration sensor for high-temperature applications" Journal of Micromechanics and Microengineering, v.16, 2006, p.2618.

Athans, A.J.;Briggs, J.B.;Jia, W.;Miller, G.P.; "Hydrogen-protected acenes" J. Mater. Chem., v.17, 2007, p.2636-2641.

Strus, M.C.;Chiaramonti, A.N.;Kim, Y.L.;Jung, Y.J.;Keller, R.R.; "Accelerated reliability testing of highly aligned single-walled carbon nanotube networks subjected to DC electrical stressing" Nanotechnology, v.22, 2011, p.265713.

McKERNAN, J.L.;Ellenbecker, M.J.; "Ventilation equations for improved exothermic process control" Annals of occupational hygiene, v.51, 2007, p.269-279.

Lu,W., Savo,S., Casse, B. and Sridhar, S. "Slow Microwave Waveguide Made of Negative Permeability Metamaterials" Microwave and Optical Technology Letters, v.51 No., 2009, p.2705.

Lu, W.T.;Savo, S.;Casse, B.D.F.;Sridhar, S.; "Slow microwave waveguide made of negative permeability metamaterials" Microwave and Optical Technology Letters, v.51, 2009, p.2705-2709.

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Chandekar, A.;Sengupta, S.K.;Whitten, J.E.; "Thermal stability of thiol and silane monolayers: A comparative study" Applied Surface Science, v.256, 2010, p.2742-2749.

Hong, Y.K.;Han, J.H.;Lee, J.H.;Park, J.G.;Busnaina, A.A.; "rry particles on wafer surfaces in Cu CMP" Solid State Phenomena, v.103, 2005, p.275-278.

Jinno, S.;Moeller, H.C.;Chen, C.L.;Rajalingam, B.;Chung, B.G.;Dokmeci, M.R.;Khademhosseini, A.; "Microfabricated multilayer paryleneâ??C stencils for the generation of patterned dynamic coâ??cultures" Journal of Biomedical Materials Research Part A, v.86, 2008, p.278-288.

Chiota, J., Shearer, J., Wei, M., Barry, C., and Mead, J. "Multiscale Directed Assembly of Polymer Blends Using Chemically Functionalized Nanoscale-Patterned Templates" Small, v.5 No. 2, 2009, p.2788.

Chiota, J.;Shearer, J.;Wei, M.;Barry, C.;Mead, J.; "Multiscale Directed Assembly of Polymer Blends Using Chemically Functionalized Nanoscaleâ??Patterned Templates" Small, v.5, 2009, p.2788-2791.

Sandler, R.;Bosso, C.J.; "Tiny technology, enormous implications" Issues in Science and Technology, v.23, 2007, p.28-30.

Kim, Y., Li, B. , An, X., Hahm, M., Chen, L., Washington, M., Ajayan, P., Nayak,S., Busnaina, A., Kar,S., and Jung, Y. "Highly Aligned Scalable All-metallic Singlewalled Carbon Nanotubes Arrays for Electrical Nanoscale Interconnects" ACS Nano, v.3, 2009, p.2818.

Kim, Y.L.;Li, B.;An, X.;Hahm, M.G.;Chen, L.;Washington, M.;Ajayan, PM;Nayak, S.K.;Busnaina, A.;Kar, S.; "Highly aligned scalable platinum-decorated single-wall carbon nanotube arrays for nanoscale electrical interconnects" ACS nano, v.3, 2009, p.2818-2826.

Wei, M.;Murphy, D.;Barry, C.;Mead, J.; "Halogen-Free Flame Retardants for Wire and Cable Applications" Rubber Chemistry and Technology, v.83, 2010, p.282.

Sang-Ho, Lee;Young-Jae, Kang;Jin-Goo, Park;Busnaina, A. A.;Jong-Myung, Lee;Tae-Hoon, Kim; "Laser shock removal of nanoparticles from Si capping layer of EUV mask" Microprocesses and Nanotechnology Conference, 2004. Digest of Papers. 2004 International, v., 2004, p.288-289.

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Bubnis, GJ;Cleary, SM;Mayne, HR; "Self-assembly and structural behavior of a model rigid C60-terminated thiolate on Au (1 1 1)" Chemical physics letters, v.470, 2009, p.289-294.

Kim, D.;Lee, J.S.;Barry, C.F.;Mead, J.L.; "Evaluation and prediction of the effects of meltâ??processing conditions on the degree of mixing in alumina/poly (ethylene terephthalate) nanocomposites" Journal of Applied Polymer Science, v.109, 2008, p.2924-2934.

Yoon, S.H.;Lee, K.H.;Palanisamy, P.;Lee, JS;Cha, N.G.;Carter, DJ;Mead, JL;Barry, CMF; "Enhancement of surface replication by gas assisted microinjection moulding" Plastics, Rubber and Composites, v.39, 2010, p.293-299.

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Xiong, X., Chen, C.-L., Ryan, P., Busnaina, A. A., Jung, Y. J. and Dokmeci, M. R. "Directed Assembly of High-density Single-Walled Carbon Nanotube Patterns on Flexible Polymer Substrates" Nanotechnology, v.20, 2009, p.295302.

Xiong, X.;Chen, C.L.;Ryan, P.;Busnaina, A.A.;Jung, Y.J.;Dokmeci, M.R.; "Directed assembly of high density single-walled carbon nanotube patterns on flexible polymer substrates" Nanotechnology, v.20, 2009, p.295302.

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Seo, J.H.;Leow, P.L.;Cho, S.H.;Lim, H.W.;Kim, J.Y.;Patel, B.A.;Park, J.G.;O "Development of inlaid electrodes for whole column electrochemical detection in HPLC" Lab Chip, v.9, 2009, p.2238-2244.

Shang, Y.;Kazmer, D.;Wei, M.;Mead, J.;Barry, C.; "Numerical simulation of phase separation of immiscible polymer blends on a heterogeneously functionalized substrate" Journal of Chemical Physics, v.128, 2008, p.224909-22.

Chen, C., Agarwal, V., Sonkusale, S. and Dokmeci, M. "The Heterogeneous Integration of Single-Walled Carbon Nanotubes onto Complementary Metal Oxide Semiconductor Circuitry for Sensing Applications" Nanotechnology, v.20, 2009, p.225302.

Chen, C.L.;Agarwal, V.;Sonkusale, S.;Dokmeci, M.R.; "The heterogeneous integration of single-walled carbon nanotubes onto complementary metal oxide semiconductor circuitry for sensing applications" Nanotechnology, v.20, 2009, p.225302.

Miller, G.P.;Kintigh, J.;Kim, E.;Weck, P.F.;Berber, S.;Tománek, D.; "Hydrogenation of single-wall carbon nanotubes using polyamine reagents: Combined experimental and theoretical study" Journal of the American Chemical Society, v.130, 2008, p.2296-2303.

Bello, D.;Wardle, B.L.;Yamamoto, N.;Guzman deVilloria, R.;Garcia, E.J.;Hart, A.J.;Ahn, K.;Ellenbecker, M.J.;Hallock, M.; "Exposure to nanoscale particles and fibers during machining of hybrid advanced composites containing carbon nanotubes" Journal of Nanoparticle Research, v.11, 2009, p.231-249.

Shang, Y.;Kazmer, D.;Wei, M.;Barry, C.;Mead, J.; "Numerical simulation of the selfâ??assembly of a polymerâ??polymerâ??solvent ternary system on a heterogeneously functionalized substrate" Science, v.50, 2010, p.2329-2339.

Shang, Y.;Kazmer, D.;Wei, M.;Barry, C.;Mead, J.; "rnary system on a heterogeneously functionalized substrate" Science, v.50, 2010, p.2329-2339.

Chang, K.;Berber, S.;Tománek, D.; "Transforming carbon nanotubes by silylation: An ab initio study" Physical review letters, v.100, 2008, p.236102.

Makaram, P.;Somu, S.;Xiong, X.;Busnaina, A.;Jung, Y.J.;McGruer, N.; "Scalable nanotemplate assisted directed assembly of single walled carbon nanotubes for nanoscale devices" Applied physics letters, v.90, 2007, p.243108.

Casse, B.D.F.;Banyal, R.K.;Lu, WT;Huang, YJ;Selvarasah, S.;Dokmeci, M.;Sridhar, S.; "Nanoengineering of a negative-index binary-staircase lens for the optics regime" Applied physics letters, v.92, 2008, p.243122.

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Adams, G.G.;McGruer, N.E.; "A Review of Adhesion in an Ohmic Microswitch" Journal of Adhesion Science and Technology, 24, v.15, 2010, p.2571-2595.

Onur Sergici, A.;Adams, G.G.;Müftü, S.; "Adhesion in the contact of a spherical indenter with a layered elastic half-space" Journal of the Mechanics and Physics of Solids, v.54, 2006, p.1843-1861.

Chandekar, A.;Alabran, M.;Sengupta, S.K.;Lee, J.S.;Mead, J.L.;Barry, C.M.F.;Whitten, J.E.;Somu, S.;Busnaina, A.A.; "Fabrication of stamps for microcontact printing by injection molding" Microelectronic Engineering, v.85, 2008, p.187-194.

Guo, ZJ;McGruer, NE;Adams, GG; "Modeling, simulation and measurement of the dynamic performance of an ohmic contact, electrostatically actuated RF MEMS switch" Journal of Micromechanics and Microengineering, v.17, 2007, p.1899.

Singh, J.;Whitten, J.E.; "Adsorption of 3-Mercaptopropyltrimethoxysilane on Silicon Oxide Surfaces and Adsorbate Interaction with Thermally Deposited Gold" The Journal of Physical Chemistry C, v.112, 2008, p.19088-190.

Belau, L.;Park, J.Y.;Liang, T.;Seo, H.;Somorjai, G.A.; "Chemical effect of dry and wet cleaning of the Ru protective layer of the extreme ultraviolet lithography reflector" Technology B: Microelectronics and Nanometer Structures, v.27, 2009, p.1919.

Xiong, X.;Makaram, P.;Busnaina, A.;Bakhtari, K.;Somu, S.;McGruer, N.;Park, J.; "Large scale directed assembly of nanoparticles using nanotrench templates" Applied physics letters, v.89, 2006, p.193108.

Boustani, I.;Zhu, Z.;Tománek, D.; "Search for the largest two-dimensional aggregates of boron: An ab initio study" Physical Review B, v.83, 2011, p.193405.

Okano, S.;Tománek, D.; "Effect of electron and hole doping on the structure of C, Si, and S nanowires" Physical Review B, v.75, 2007, p.195409.

Casse, B., Lu, W., Banyal, R. Huang, Y., Selvarasah, S., Dokmeci, M., Perry, C. and Sridhar, S. "Imaging with Subwavelength Resolution by a Generalized Superlens at Infrared Wavelengths" Optics Letters, v.34 (13), 2009, p.1994.

Casse, BDF;Lu, WT;Banyal, RK;Huang, YJ;Selvarasah, S.;Dokmeci, MR;Perry, CH;Sridhar, S.; "Imaging with subwavelength resolution by a generalized superlens at infrared wavelengths" Optics letters, v.34, 2009, p.1994-1996.

Li, X.;Cao, A.;Jung, Y.J.;Vajtai, R.;Ajayan, P.M.; "Bottom-up growth of carbon nanotube multilayers: unprecedented growth" Nano letters, v.5, 2005, p.1997-2000.

Xiong, X.;Jaberansari, L.;Hahm, M.G.;Busnaina, A.;Jung, Y.J.; "Building Highly Organized Singleâ??Walledâ??Carbonâ??Nanotube Networks Using Templateâ??Guided Fluidic Assembly" Small, v.3, 2007, p.2006-2010.

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Lavoie, C.;Detavernier, C.;Cabral, C.;dâ??Heurle, FM;Kellock, AJ;Jordan-Sweet, J.;Harper, JME; "Effects of additive elements on the phase formation and morphological stability of nickel monosilicide films" Microelectronic Engineering, v.83, 2006, p.2042-2054.

Wongkasem, N.;Akyurtlu, A.;Li, J.;Tibolt, A.;Kang, Z.;Goodhue, W.D.; "Novel broadband terahertz negative refractive index metamaterials: Analysis and experiment" Progress In Electromagnetics Research, v.64, 2006, p.205-218.

Kussow, A.G.;Akyurtlu, A.; "Negative refraction index in the magnetic semiconductor In_ {2â?? x} Cr_ {x} O_ {3}: Theoretical analysis" Physical Review B, v.78, 2008, p.205202.

Kang, S.H.;Kwon, Y.K.;Tománek, D.; "Effect of bundling on the stability, equilibrium geometry, and electronic structure of Mo_ {6} S_ {9â?? x} I_ {x} nanowires" Physical Review B, v.82, 2010, p.205427.

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Berezutskiy, G., Lucas-Hurt L., Bubnis, G.J. and Mayne, H. R. "A model study of adlayer pattern formation on hexagonal substrates" American Chemical Society, v.Book of, 2009, p.213.

Majidi, C.;Adams, G.G.; "Adhesion and delamination boundary conditions for elastic plates with arbitrary contact shape" Mechanics Research Communications, v.37, 2010, p.214-218.

Chang, K.;Kim, E.;Weck, P.F.;Tománek, D.; "Nanoconfinement effects on the reversibility of hydrogen storage in ammonia borane: A first-principles study" The Journal of chemical physics, v.134, 2011, p.214501.

Joudrey, K.;Adams, G.G.;McGruer, N.E.; "Design, modeling, fabrication and testing of a high aspect ratio electrostatic torsional MEMS micromirror" Journal of Micromechanics and Microengineering, v.16, 2006, p.2147.

Bubnis, G.J. and Mayne, H. R. "Modeling Hydrogen Bond Driven Molecular Pattern Formation on Au(111)" American Chemical Society, v.Book of, 2009, p.215.

Schmidt, DF;Qian, G.;Giannelis, EP; "Nanocomposites from novel synthetic organo-layer silicates" Polymeric Materials Science and Engineering(USA), v.82, 2000, p.215-216.

Adams, G.G.;McGruer, N.E.; "Nanocontacts and Switch Reliability" Nanomanufacturing handbook, v., 2007, p.217.

Karimi, P.;Kim, T.;Aceros, J.;Park, J.;Busnaina, A.A.; "The removal of nanoparticles from sub-micron trenches using megasonics" Microelectronic Engineering, v.87, 2010, p.1665-1668.

Ma, X.;Huo, H.;Wei, M.;Wang, L.;Shen, M.;Barry, C.;Mead, J.; "Enhanced protein binding on femtosecond laser ablated poly (methyl methacrylate) surfaces" Applied physics letters, v.98, 2011, p.171101.

Hahm, M.G.;Kwon, Y.K.;Lee, E.;Ahn, C.W.;Jung, Y.J.; "Diameter selective growth of vertically aligned single walled carbon nanotubes and study on their growth mechanism" The Journal of Physical Chemistry C, v.112, 2008, p.17143-171.

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Project Outcomes Report

Disclaimer

This Project Outcomes Report for the General Public is displayed verbatim as submitted by the Principal Investigator (PI) for this award. Any opinions, findings, and conclusions or recommendations expressed in this Report are those of the PI and do not necessarily reflect the views of the National Science Foundation; NSF has not approved or endorsed its content.

The NSF Center for High-rate Nanomanufacturing (CHN) developed tools and processes that make it possible to quickly and efficiently manufacture an array of nano-enabled products using nanomaterials such as carbon nanotubes, nanoparticles, 2D materials and polymers to bridge the gap between nanoscale science research and the creation of commercial products. Originally established by the NSF in 2004, this award sponsored activities from 2009-2015 at Northeastern University, Michigan State University, University of Massachusetts-Lowell, University of New Hampshire, and the Museum of Science, Boston.

The CHN tools and processes enabled nanoscale high-rate directed assembly and printing of nano-enabled electronics, sensing, medical energy and functional materials applications to harness the unique and superior properties of nanomaterials. The Center developed a directed assembly and transfer toolbox that can used to print nanoscale structures from a variety of nanomaterials onto many different surfaces. The Center has significantly contributed to understanding of the directed assembly and alignment mechanism for nanomaterials and their transfer.

The CHN developed an improved synthesis of new and robust organic semiconductors used in organic electronics applications such as printed electronics, flexible displays, and flexible solar cells. For example, the CHN designed and synthesized the first water soluble pentacene derivative, a new acene derivative, TTPO, that shows greater photo oxidative and thermal stabilities than any other small band gap organic semiconductor previously reported. This will allow manufacturing of robust organics electronics that are more resistant to degradation.

Electrophoretic directed assembly on a variety of surfaces and films including insulating organic and inorganic substrates has been developed to enable rapid, large-scale assembly and printing. A new method that uses interfacial convective assembly for the fabrication of 2D and 3D nanostructures with controlled dimensions has been shown to be material and surface independent and more than 100 times faster than previous convective assembly techniques. We developed nanoscale 3D printing to make 3D nanostructures of metals, oxides, polymers, and hybrid materials comprised of metal-polymer, metal-oxide and metal-polymer-metal heterostructures. A new type of reusable Damascene template for nanoscale printing of devices was developed utilizing directed assembly and transfer of nanomaterials.

A life-cycle assessment methodology was utilized to address ethical, legal, and societal impacts in decision-making as nanomanufacturing scales to commercial production. We applied the LCA approach to three carbon nanotube-enabled CHN applications (sensors, electronics and batteries), as they apply to manufacturing, use, and end-of-life management, including recycling and disposal. Our responsible nanomanufacturing efforts utilize the oxidative stress exerted by nanomaterials in biological systems as one of the key metrics to screen for potential adverse effects on human health and the environment.

Based on the Damascene template technology, the CHN in collaboration with a Massachusetts company has developed the first fully-automated robotic Nanoscale Offset Printing System (NanoOPS) that can print a variety of nanoscale devices. The system can print metals, insulators and semiconductors, and organic and inorganic materials to make devices with resolution down to 20 nanometers. NanoOPS has the potential to transform nanomanufacturing and nano-enabled technologies, and will spur innovation by drastically overcoming the high cost entry barrier to the fabrication of nanoscale devices without endangering workers or harming the environment. 58 companies and agencies attended the unveiling of NanoOPS in September 2014. The technology was featured by Wired magazine and is a ...

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